3/24/2010	1:14:04 PM	Bypass valve closed
3/24/2010	1:14:05 PM	Main Vac valve closed
3/24/2010	1:14:14 PM	Bypass valve opened
3/24/2010	1:14:15 PM	Main Vac valve opened
3/24/2010	1:15:53 PM	Bypass valve closed
3/24/2010	1:15:54 PM	Main Vac valve closed
3/24/2010	1:15:56 PM	Main Vac valve opened
3/24/2010	1:15:57 PM	Bypass valve opened
3/24/2010	1:16:11 PM	Helium MFC set to  100.000000
3/24/2010	1:16:20 PM	Helium valve opened
3/24/2010	1:16:38 PM	Helium valve closed
3/24/2010	1:16:44 PM	Helium MFC set to  0.000000
3/24/2010	1:19:26 PM	Bypass valve closed
3/24/2010	1:19:26 PM	Bypass valve opened
3/24/2010	1:19:27 PM	Bypass valve closed
3/24/2010	1:19:28 PM	Bypass valve opened
3/24/2010	1:27:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2010	1:27:28 PM	Recipe started at 1:27 PM
3/24/2010	1:27:28 PM	H2 valve closed
3/24/2010	1:27:28 PM	BCl3 valve closed
3/24/2010	1:27:28 PM	PH3 valve closed
3/24/2010	1:27:28 PM	SiCl4 pre valve closed
3/24/2010	1:27:28 PM	SiCl4 post valve closed
3/24/2010	1:27:28 PM	Main Vac valve closed
3/24/2010	1:27:28 PM	Bypass valve closed
3/24/2010	1:27:28 PM	Bubbler valve closed
3/24/2010	1:27:28 PM	Helium valve opened
3/24/2010	1:27:28 PM	Helium MFC set to  500.000000
3/24/2010	1:27:28 PM	H2 MFC set to  0.000000
3/24/2010	1:27:28 PM	BCl3 MFC set to  0.000000
3/24/2010	1:27:28 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:27:28 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:27:28 PM	Tube furnace set to 0
3/24/2010	1:28:49 PM	Helium valve closed
3/24/2010	1:28:49 PM	H2 valve closed
3/24/2010	1:28:49 PM	BCl3 valve closed
3/24/2010	1:28:49 PM	PH3 valve closed
3/24/2010	1:28:49 PM	SiCl4 pre valve closed
3/24/2010	1:28:49 PM	SiCl4 post valve closed
3/24/2010	1:28:49 PM	Main Vac valve closed
3/24/2010	1:28:49 PM	Bypass valve closed
3/24/2010	1:28:49 PM	Bubbler valve closed
3/24/2010	1:28:49 PM	Helium MFC set to  0.000000
3/24/2010	1:28:49 PM	H2 MFC set to  0.000000
3/24/2010	1:28:49 PM	BCl3 MFC set to  0.000000
3/24/2010	1:28:49 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:28:49 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:28:49 PM	Tube furnace set to 0
3/24/2010	1:28:49 PM	Run finished at 1:28 PM
3/24/2010	1:28:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2010	1:29:11 PM	Helium MFC set to  100.000000
3/24/2010	1:29:12 PM	Helium valve opened
3/24/2010	1:29:16 PM	Helium valve closed
3/24/2010	1:29:19 PM	Helium valve opened
3/24/2010	1:29:25 PM	Helium valve closed
3/24/2010	1:29:32 PM	Bubbler valve opened
3/24/2010	1:29:33 PM	Bubbler valve closed
3/24/2010	1:29:47 PM	Helium MFC set to  0.000000
3/24/2010	1:48:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	1:48:55 PM	Recipe started at 1:48 PM
3/24/2010	1:48:55 PM	Helium valve closed
3/24/2010	1:48:55 PM	H2 valve closed
3/24/2010	1:48:55 PM	BCl3 valve closed
3/24/2010	1:48:55 PM	PH3 valve closed
3/24/2010	1:48:55 PM	SiCl4 pre valve closed
3/24/2010	1:48:55 PM	SiCl4 post valve closed
3/24/2010	1:48:55 PM	Main Vac valve closed
3/24/2010	1:48:55 PM	Bubbler valve closed
3/24/2010	1:48:55 PM	Bypass valve opened
3/24/2010	1:48:55 PM	Helium MFC set to  0.000000
3/24/2010	1:48:55 PM	H2 MFC set to  0.000000
3/24/2010	1:48:55 PM	BCl3 MFC set to  0.000000
3/24/2010	1:48:55 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:48:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:48:55 PM	Tube furnace set to 0
3/24/2010	1:49:27 PM	Helium valve closed
3/24/2010	1:49:27 PM	H2 valve closed
3/24/2010	1:49:27 PM	BCl3 valve closed
3/24/2010	1:49:27 PM	PH3 valve closed
3/24/2010	1:49:27 PM	SiCl4 pre valve closed
3/24/2010	1:49:27 PM	SiCl4 post valve closed
3/24/2010	1:49:27 PM	Bubbler valve closed
3/24/2010	1:49:27 PM	Main Vac valve opened
3/24/2010	1:49:27 PM	Bypass valve opened
3/24/2010	1:49:27 PM	Helium MFC set to  0.000000
3/24/2010	1:49:27 PM	H2 MFC set to  0.000000
3/24/2010	1:49:27 PM	BCl3 MFC set to  0.000000
3/24/2010	1:49:27 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:49:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:49:27 PM	Tube furnace set to 0
3/24/2010	1:49:27 PM	Run finished at 1:49 PM
3/24/2010	1:49:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	1:51:27 PM	Bypass valve closed
3/24/2010	1:51:27 PM	Main Vac valve closed
3/24/2010	1:51:50 PM	Bypass valve opened
3/24/2010	1:51:51 PM	Main Vac valve opened
3/24/2010	1:52:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	1:52:24 PM	Recipe started at 1:52 PM
3/24/2010	1:52:24 PM	H2 valve closed
3/24/2010	1:52:24 PM	BCl3 valve closed
3/24/2010	1:52:24 PM	PH3 valve closed
3/24/2010	1:52:24 PM	SiCl4 pre valve closed
3/24/2010	1:52:24 PM	SiCl4 post valve closed
3/24/2010	1:52:24 PM	Main Vac valve closed
3/24/2010	1:52:24 PM	Bypass valve closed
3/24/2010	1:52:24 PM	Bubbler valve closed
3/24/2010	1:52:24 PM	Helium valve opened
3/24/2010	1:52:24 PM	Helium MFC set to  500.000000
3/24/2010	1:52:24 PM	H2 MFC set to  0.000000
3/24/2010	1:52:24 PM	BCl3 MFC set to  0.000000
3/24/2010	1:52:24 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:52:24 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:52:24 PM	Tube furnace set to 0
3/24/2010	1:53:46 PM	Helium valve closed
3/24/2010	1:53:46 PM	H2 valve closed
3/24/2010	1:53:46 PM	BCl3 valve closed
3/24/2010	1:53:46 PM	PH3 valve closed
3/24/2010	1:53:46 PM	SiCl4 pre valve closed
3/24/2010	1:53:46 PM	SiCl4 post valve closed
3/24/2010	1:53:46 PM	Main Vac valve closed
3/24/2010	1:53:46 PM	Bypass valve closed
3/24/2010	1:53:46 PM	Bubbler valve closed
3/24/2010	1:53:46 PM	Helium MFC set to  0.000000
3/24/2010	1:53:46 PM	H2 MFC set to  0.000000
3/24/2010	1:53:46 PM	BCl3 MFC set to  0.000000
3/24/2010	1:53:46 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:53:46 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:53:46 PM	Tube furnace set to 0
3/24/2010	1:54:01 PM	Helium valve closed
3/24/2010	1:54:01 PM	H2 valve closed
3/24/2010	1:54:01 PM	BCl3 valve closed
3/24/2010	1:54:01 PM	PH3 valve closed
3/24/2010	1:54:01 PM	SiCl4 pre valve closed
3/24/2010	1:54:01 PM	SiCl4 post valve closed
3/24/2010	1:54:01 PM	Main Vac valve closed
3/24/2010	1:54:01 PM	Bubbler valve closed
3/24/2010	1:54:01 PM	Bypass valve opened
3/24/2010	1:54:01 PM	Helium MFC set to  0.000000
3/24/2010	1:54:02 PM	H2 MFC set to  0.000000
3/24/2010	1:54:02 PM	BCl3 MFC set to  0.000000
3/24/2010	1:54:02 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:54:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:54:02 PM	Tube furnace set to 0
3/24/2010	1:54:25 PM	Helium valve closed
3/24/2010	1:54:25 PM	H2 valve closed
3/24/2010	1:54:25 PM	BCl3 valve closed
3/24/2010	1:54:25 PM	PH3 valve closed
3/24/2010	1:54:25 PM	SiCl4 pre valve closed
3/24/2010	1:54:25 PM	SiCl4 post valve closed
3/24/2010	1:54:25 PM	Bubbler valve closed
3/24/2010	1:54:25 PM	Main Vac valve opened
3/24/2010	1:54:25 PM	Bypass valve opened
3/24/2010	1:54:25 PM	Helium MFC set to  0.000000
3/24/2010	1:54:25 PM	H2 MFC set to  0.000000
3/24/2010	1:54:25 PM	BCl3 MFC set to  0.000000
3/24/2010	1:54:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:54:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:54:25 PM	Tube furnace set to 0
3/24/2010	1:59:25 PM	H2 valve closed
3/24/2010	1:59:25 PM	BCl3 valve closed
3/24/2010	1:59:25 PM	PH3 valve closed
3/24/2010	1:59:25 PM	SiCl4 pre valve closed
3/24/2010	1:59:25 PM	SiCl4 post valve closed
3/24/2010	1:59:25 PM	Main Vac valve closed
3/24/2010	1:59:25 PM	Bypass valve closed
3/24/2010	1:59:25 PM	Bubbler valve closed
3/24/2010	1:59:25 PM	Helium valve opened
3/24/2010	1:59:25 PM	Helium MFC set to  500.000000
3/24/2010	1:59:25 PM	H2 MFC set to  0.000000
3/24/2010	1:59:25 PM	BCl3 MFC set to  0.000000
3/24/2010	1:59:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	1:59:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	1:59:25 PM	Tube furnace set to 0
3/24/2010	2:00:47 PM	Helium valve closed
3/24/2010	2:00:47 PM	H2 valve closed
3/24/2010	2:00:47 PM	BCl3 valve closed
3/24/2010	2:00:47 PM	PH3 valve closed
3/24/2010	2:00:47 PM	SiCl4 pre valve closed
3/24/2010	2:00:47 PM	SiCl4 post valve closed
3/24/2010	2:00:47 PM	Main Vac valve closed
3/24/2010	2:00:47 PM	Bypass valve closed
3/24/2010	2:00:47 PM	Bubbler valve closed
3/24/2010	2:00:47 PM	Helium MFC set to  0.000000
3/24/2010	2:00:47 PM	H2 MFC set to  0.000000
3/24/2010	2:00:47 PM	BCl3 MFC set to  0.000000
3/24/2010	2:00:47 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:00:47 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:00:47 PM	Tube furnace set to 0
3/24/2010	2:01:02 PM	Helium valve closed
3/24/2010	2:01:02 PM	H2 valve closed
3/24/2010	2:01:02 PM	BCl3 valve closed
3/24/2010	2:01:02 PM	PH3 valve closed
3/24/2010	2:01:02 PM	SiCl4 pre valve closed
3/24/2010	2:01:02 PM	SiCl4 post valve closed
3/24/2010	2:01:02 PM	Main Vac valve closed
3/24/2010	2:01:02 PM	Bubbler valve closed
3/24/2010	2:01:02 PM	Bypass valve opened
3/24/2010	2:01:02 PM	Helium MFC set to  0.000000
3/24/2010	2:01:02 PM	H2 MFC set to  0.000000
3/24/2010	2:01:02 PM	BCl3 MFC set to  0.000000
3/24/2010	2:01:02 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:01:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:01:02 PM	Tube furnace set to 0
3/24/2010	2:01:25 PM	Helium valve closed
3/24/2010	2:01:25 PM	H2 valve closed
3/24/2010	2:01:25 PM	BCl3 valve closed
3/24/2010	2:01:25 PM	PH3 valve closed
3/24/2010	2:01:25 PM	SiCl4 pre valve closed
3/24/2010	2:01:25 PM	SiCl4 post valve closed
3/24/2010	2:01:25 PM	Bubbler valve closed
3/24/2010	2:01:25 PM	Main Vac valve opened
3/24/2010	2:01:25 PM	Bypass valve opened
3/24/2010	2:01:25 PM	Helium MFC set to  0.000000
3/24/2010	2:01:25 PM	H2 MFC set to  0.000000
3/24/2010	2:01:25 PM	BCl3 MFC set to  0.000000
3/24/2010	2:01:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:01:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:01:25 PM	Tube furnace set to 0
3/24/2010	2:06:25 PM	H2 valve closed
3/24/2010	2:06:25 PM	BCl3 valve closed
3/24/2010	2:06:25 PM	PH3 valve closed
3/24/2010	2:06:25 PM	SiCl4 pre valve closed
3/24/2010	2:06:25 PM	SiCl4 post valve closed
3/24/2010	2:06:25 PM	Main Vac valve closed
3/24/2010	2:06:25 PM	Bypass valve closed
3/24/2010	2:06:25 PM	Bubbler valve closed
3/24/2010	2:06:25 PM	Helium valve opened
3/24/2010	2:06:25 PM	Helium MFC set to  500.000000
3/24/2010	2:06:25 PM	H2 MFC set to  0.000000
3/24/2010	2:06:25 PM	BCl3 MFC set to  0.000000
3/24/2010	2:06:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:06:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:06:25 PM	Tube furnace set to 0
3/24/2010	2:07:47 PM	Helium valve closed
3/24/2010	2:07:47 PM	H2 valve closed
3/24/2010	2:07:47 PM	BCl3 valve closed
3/24/2010	2:07:47 PM	PH3 valve closed
3/24/2010	2:07:47 PM	SiCl4 pre valve closed
3/24/2010	2:07:47 PM	SiCl4 post valve closed
3/24/2010	2:07:47 PM	Main Vac valve closed
3/24/2010	2:07:47 PM	Bypass valve closed
3/24/2010	2:07:47 PM	Bubbler valve closed
3/24/2010	2:07:47 PM	Helium MFC set to  0.000000
3/24/2010	2:07:47 PM	H2 MFC set to  0.000000
3/24/2010	2:07:47 PM	BCl3 MFC set to  0.000000
3/24/2010	2:07:47 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:07:47 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:07:47 PM	Tube furnace set to 0
3/24/2010	2:08:02 PM	Helium valve closed
3/24/2010	2:08:02 PM	H2 valve closed
3/24/2010	2:08:02 PM	BCl3 valve closed
3/24/2010	2:08:02 PM	PH3 valve closed
3/24/2010	2:08:02 PM	SiCl4 pre valve closed
3/24/2010	2:08:02 PM	SiCl4 post valve closed
3/24/2010	2:08:02 PM	Main Vac valve closed
3/24/2010	2:08:02 PM	Bubbler valve closed
3/24/2010	2:08:02 PM	Bypass valve opened
3/24/2010	2:08:02 PM	Helium MFC set to  0.000000
3/24/2010	2:08:02 PM	H2 MFC set to  0.000000
3/24/2010	2:08:02 PM	BCl3 MFC set to  0.000000
3/24/2010	2:08:02 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:08:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:08:02 PM	Tube furnace set to 0
3/24/2010	2:08:25 PM	Helium valve closed
3/24/2010	2:08:25 PM	H2 valve closed
3/24/2010	2:08:25 PM	BCl3 valve closed
3/24/2010	2:08:25 PM	PH3 valve closed
3/24/2010	2:08:25 PM	SiCl4 pre valve closed
3/24/2010	2:08:25 PM	SiCl4 post valve closed
3/24/2010	2:08:25 PM	Bubbler valve closed
3/24/2010	2:08:25 PM	Main Vac valve opened
3/24/2010	2:08:25 PM	Bypass valve opened
3/24/2010	2:08:25 PM	Helium MFC set to  0.000000
3/24/2010	2:08:25 PM	H2 MFC set to  0.000000
3/24/2010	2:08:25 PM	BCl3 MFC set to  0.000000
3/24/2010	2:08:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:08:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:08:25 PM	Tube furnace set to 0
3/24/2010	2:10:41 PM	Helium valve closed
3/24/2010	2:10:41 PM	H2 valve closed
3/24/2010	2:10:41 PM	BCl3 valve closed
3/24/2010	2:10:41 PM	PH3 valve closed
3/24/2010	2:10:41 PM	SiCl4 pre valve closed
3/24/2010	2:10:41 PM	SiCl4 post valve closed
3/24/2010	2:10:41 PM	Bubbler valve closed
3/24/2010	2:10:41 PM	Main Vac valve opened
3/24/2010	2:10:41 PM	Bypass valve opened
3/24/2010	2:10:41 PM	Helium MFC set to  0.000000
3/24/2010	2:10:41 PM	H2 MFC set to  0.000000
3/24/2010	2:10:41 PM	BCl3 MFC set to  0.000000
3/24/2010	2:10:41 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:10:41 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:10:41 PM	Tube furnace set to 0
3/24/2010	2:10:42 PM	Run finished at 2:10 PM
3/24/2010	2:10:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	2:10:44 PM	Bypass valve closed
3/24/2010	2:10:44 PM	Main Vac valve closed
3/24/2010	2:11:37 PM	Bypass valve opened
3/24/2010	2:11:37 PM	Main Vac valve opened
3/24/2010	2:25:31 PM	Recipe started at 2:25 PM
3/24/2010	2:25:31 PM	Helium valve closed
3/24/2010	2:25:31 PM	BCl3 valve closed
3/24/2010	2:25:31 PM	PH3 valve closed
3/24/2010	2:25:31 PM	SiCl4 pre valve closed
3/24/2010	2:25:31 PM	SiCl4 post valve closed
3/24/2010	2:25:31 PM	Main Vac valve closed
3/24/2010	2:25:31 PM	Bypass valve closed
3/24/2010	2:25:31 PM	Bubbler valve closed
3/24/2010	2:25:31 PM	H2 valve opened
3/24/2010	2:25:31 PM	Helium MFC set to  0.000000
3/24/2010	2:25:31 PM	H2 MFC set to  500.000000
3/24/2010	2:25:31 PM	BCl3 MFC set to  0.000000
3/24/2010	2:25:31 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:25:31 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:25:31 PM	Tube furnace set to 0
3/24/2010	2:26:53 PM	Helium valve closed
3/24/2010	2:26:53 PM	BCl3 valve closed
3/24/2010	2:26:53 PM	PH3 valve closed
3/24/2010	2:26:53 PM	SiCl4 pre valve closed
3/24/2010	2:26:53 PM	SiCl4 post valve closed
3/24/2010	2:26:53 PM	Main Vac valve closed
3/24/2010	2:26:53 PM	Bypass valve closed
3/24/2010	2:26:53 PM	H2 valve opened
3/24/2010	2:26:53 PM	Bubbler valve opened
3/24/2010	2:26:53 PM	Helium MFC set to  0.000000
3/24/2010	2:26:53 PM	H2 MFC set to  500.000000
3/24/2010	2:26:53 PM	BCl3 MFC set to  0.000000
3/24/2010	2:26:53 PM	SiCl4 MFC set to  0.000000
3/24/2010	2:26:53 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:26:53 PM	Tube furnace set to 0
3/24/2010	2:46:53 PM	Helium valve closed
3/24/2010	2:46:53 PM	PH3 valve closed
3/24/2010	2:46:53 PM	Main Vac valve closed
3/24/2010	2:46:53 PM	Bypass valve closed
3/24/2010	2:46:53 PM	H2 valve opened
3/24/2010	2:46:53 PM	BCl3 valve opened
3/24/2010	2:46:53 PM	SiCl4 pre valve opened
3/24/2010	2:46:53 PM	SiCl4 post valve opened
3/24/2010	2:46:53 PM	Bubbler valve opened
3/24/2010	2:46:53 PM	Helium MFC set to  0.000000
3/24/2010	2:46:53 PM	H2 MFC set to  500.000000
3/24/2010	2:46:53 PM	BCl3 MFC set to  35.000000
3/24/2010	2:46:53 PM	SiCl4 MFC set to  325.000000
3/24/2010	2:46:53 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	2:46:53 PM	Tube furnace set to 0
3/24/2010	3:06:54 PM	H2 valve closed
3/24/2010	3:06:54 PM	BCl3 valve closed
3/24/2010	3:06:54 PM	PH3 valve closed
3/24/2010	3:06:54 PM	SiCl4 pre valve closed
3/24/2010	3:06:54 PM	SiCl4 post valve closed
3/24/2010	3:06:54 PM	Main Vac valve closed
3/24/2010	3:06:54 PM	Bypass valve closed
3/24/2010	3:06:54 PM	Helium valve opened
3/24/2010	3:06:54 PM	Bubbler valve opened
3/24/2010	3:06:54 PM	Helium MFC set to  500.000000
3/24/2010	3:06:54 PM	H2 MFC set to  0.000000
3/24/2010	3:06:54 PM	BCl3 MFC set to  0.000000
3/24/2010	3:06:54 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:06:54 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:06:54 PM	Tube furnace set to 0
3/24/2010	3:26:54 PM	H2 valve closed
3/24/2010	3:26:54 PM	BCl3 valve closed
3/24/2010	3:26:54 PM	PH3 valve closed
3/24/2010	3:26:54 PM	SiCl4 pre valve closed
3/24/2010	3:26:54 PM	SiCl4 post valve closed
3/24/2010	3:26:54 PM	Main Vac valve closed
3/24/2010	3:26:54 PM	Bypass valve closed
3/24/2010	3:26:54 PM	Helium valve opened
3/24/2010	3:26:54 PM	Bubbler valve opened
3/24/2010	3:26:54 PM	Helium MFC set to  500.000000
3/24/2010	3:26:54 PM	H2 MFC set to  0.000000
3/24/2010	3:26:54 PM	BCl3 MFC set to  0.000000
3/24/2010	3:26:54 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:26:54 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:26:54 PM	Tube furnace set to 0
3/24/2010	3:46:54 PM	Helium valve closed
3/24/2010	3:46:54 PM	H2 valve closed
3/24/2010	3:46:54 PM	BCl3 valve closed
3/24/2010	3:46:54 PM	PH3 valve closed
3/24/2010	3:46:54 PM	SiCl4 pre valve closed
3/24/2010	3:46:54 PM	SiCl4 post valve closed
3/24/2010	3:46:54 PM	Main Vac valve closed
3/24/2010	3:46:54 PM	Bypass valve closed
3/24/2010	3:46:54 PM	Bubbler valve closed
3/24/2010	3:46:54 PM	Helium MFC set to  0.000000
3/24/2010	3:46:54 PM	H2 MFC set to  0.000000
3/24/2010	3:46:54 PM	BCl3 MFC set to  0.000000
3/24/2010	3:46:54 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:46:54 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:46:54 PM	Tube furnace set to 0
3/24/2010	3:46:55 PM	Run finished at 3:46 PM
3/24/2010	3:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	3:55:15 PM	Recipe started at 3:55 PM
3/24/2010	3:55:15 PM	Helium valve closed
3/24/2010	3:55:15 PM	H2 valve closed
3/24/2010	3:55:15 PM	BCl3 valve closed
3/24/2010	3:55:15 PM	PH3 valve closed
3/24/2010	3:55:15 PM	SiCl4 pre valve closed
3/24/2010	3:55:15 PM	SiCl4 post valve closed
3/24/2010	3:55:15 PM	Main Vac valve closed
3/24/2010	3:55:15 PM	Bubbler valve closed
3/24/2010	3:55:15 PM	Bypass valve opened
3/24/2010	3:55:15 PM	Helium MFC set to  0.000000
3/24/2010	3:55:15 PM	H2 MFC set to  0.000000
3/24/2010	3:55:15 PM	BCl3 MFC set to  0.000000
3/24/2010	3:55:15 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:55:15 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:55:15 PM	Tube furnace set to 0
3/24/2010	3:55:48 PM	Helium valve closed
3/24/2010	3:55:48 PM	H2 valve closed
3/24/2010	3:55:48 PM	BCl3 valve closed
3/24/2010	3:55:48 PM	PH3 valve closed
3/24/2010	3:55:48 PM	SiCl4 pre valve closed
3/24/2010	3:55:48 PM	SiCl4 post valve closed
3/24/2010	3:55:48 PM	Bubbler valve closed
3/24/2010	3:55:48 PM	Main Vac valve opened
3/24/2010	3:55:48 PM	Bypass valve opened
3/24/2010	3:55:48 PM	Helium MFC set to  0.000000
3/24/2010	3:55:48 PM	H2 MFC set to  0.000000
3/24/2010	3:55:48 PM	BCl3 MFC set to  0.000000
3/24/2010	3:55:48 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:55:48 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:55:48 PM	Tube furnace set to 0
3/24/2010	3:55:48 PM	Run finished at 3:55 PM
3/24/2010	3:55:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	3:56:25 PM	Main Vac valve closed
3/24/2010	3:56:26 PM	Bypass valve closed
3/24/2010	3:56:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	3:56:55 PM	Recipe started at 3:56 PM
3/24/2010	3:56:55 PM	H2 valve closed
3/24/2010	3:56:55 PM	BCl3 valve closed
3/24/2010	3:56:55 PM	PH3 valve closed
3/24/2010	3:56:55 PM	SiCl4 pre valve closed
3/24/2010	3:56:55 PM	SiCl4 post valve closed
3/24/2010	3:56:55 PM	Main Vac valve closed
3/24/2010	3:56:55 PM	Bypass valve closed
3/24/2010	3:56:55 PM	Bubbler valve closed
3/24/2010	3:56:55 PM	Helium valve opened
3/24/2010	3:56:55 PM	Helium MFC set to  500.000000
3/24/2010	3:56:55 PM	H2 MFC set to  0.000000
3/24/2010	3:56:55 PM	BCl3 MFC set to  0.000000
3/24/2010	3:56:55 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:56:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:56:55 PM	Tube furnace set to 0
3/24/2010	3:58:14 PM	Helium valve closed
3/24/2010	3:58:14 PM	H2 valve closed
3/24/2010	3:58:14 PM	BCl3 valve closed
3/24/2010	3:58:14 PM	PH3 valve closed
3/24/2010	3:58:14 PM	SiCl4 pre valve closed
3/24/2010	3:58:14 PM	SiCl4 post valve closed
3/24/2010	3:58:14 PM	Main Vac valve closed
3/24/2010	3:58:14 PM	Bypass valve closed
3/24/2010	3:58:14 PM	Bubbler valve closed
3/24/2010	3:58:14 PM	Helium MFC set to  0.000000
3/24/2010	3:58:14 PM	H2 MFC set to  0.000000
3/24/2010	3:58:14 PM	BCl3 MFC set to  0.000000
3/24/2010	3:58:14 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:58:14 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:58:14 PM	Tube furnace set to 0
3/24/2010	3:58:29 PM	Helium valve closed
3/24/2010	3:58:29 PM	H2 valve closed
3/24/2010	3:58:29 PM	BCl3 valve closed
3/24/2010	3:58:29 PM	PH3 valve closed
3/24/2010	3:58:29 PM	SiCl4 pre valve closed
3/24/2010	3:58:29 PM	SiCl4 post valve closed
3/24/2010	3:58:29 PM	Main Vac valve closed
3/24/2010	3:58:29 PM	Bubbler valve closed
3/24/2010	3:58:29 PM	Bypass valve opened
3/24/2010	3:58:29 PM	Helium MFC set to  0.000000
3/24/2010	3:58:29 PM	H2 MFC set to  0.000000
3/24/2010	3:58:29 PM	BCl3 MFC set to  0.000000
3/24/2010	3:58:29 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:58:29 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:58:29 PM	Tube furnace set to 0
3/24/2010	3:58:52 PM	Helium valve closed
3/24/2010	3:58:52 PM	H2 valve closed
3/24/2010	3:58:52 PM	BCl3 valve closed
3/24/2010	3:58:52 PM	PH3 valve closed
3/24/2010	3:58:52 PM	SiCl4 pre valve closed
3/24/2010	3:58:52 PM	SiCl4 post valve closed
3/24/2010	3:58:52 PM	Bubbler valve closed
3/24/2010	3:58:52 PM	Main Vac valve opened
3/24/2010	3:58:52 PM	Bypass valve opened
3/24/2010	3:58:52 PM	Helium MFC set to  0.000000
3/24/2010	3:58:52 PM	H2 MFC set to  0.000000
3/24/2010	3:58:52 PM	BCl3 MFC set to  0.000000
3/24/2010	3:58:52 PM	SiCl4 MFC set to  0.000000
3/24/2010	3:58:52 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	3:58:52 PM	Tube furnace set to 0
3/24/2010	4:03:52 PM	H2 valve closed
3/24/2010	4:03:52 PM	BCl3 valve closed
3/24/2010	4:03:52 PM	PH3 valve closed
3/24/2010	4:03:52 PM	SiCl4 pre valve closed
3/24/2010	4:03:52 PM	SiCl4 post valve closed
3/24/2010	4:03:52 PM	Main Vac valve closed
3/24/2010	4:03:52 PM	Bypass valve closed
3/24/2010	4:03:52 PM	Bubbler valve closed
3/24/2010	4:03:52 PM	Helium valve opened
3/24/2010	4:03:52 PM	Helium MFC set to  500.000000
3/24/2010	4:03:52 PM	H2 MFC set to  0.000000
3/24/2010	4:03:52 PM	BCl3 MFC set to  0.000000
3/24/2010	4:03:52 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:03:52 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:03:52 PM	Tube furnace set to 0
3/24/2010	4:05:11 PM	Helium valve closed
3/24/2010	4:05:11 PM	H2 valve closed
3/24/2010	4:05:11 PM	BCl3 valve closed
3/24/2010	4:05:11 PM	PH3 valve closed
3/24/2010	4:05:11 PM	SiCl4 pre valve closed
3/24/2010	4:05:11 PM	SiCl4 post valve closed
3/24/2010	4:05:11 PM	Main Vac valve closed
3/24/2010	4:05:11 PM	Bypass valve closed
3/24/2010	4:05:11 PM	Bubbler valve closed
3/24/2010	4:05:11 PM	Helium MFC set to  0.000000
3/24/2010	4:05:11 PM	H2 MFC set to  0.000000
3/24/2010	4:05:11 PM	BCl3 MFC set to  0.000000
3/24/2010	4:05:11 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:05:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:05:11 PM	Tube furnace set to 0
3/24/2010	4:05:26 PM	Helium valve closed
3/24/2010	4:05:26 PM	H2 valve closed
3/24/2010	4:05:26 PM	BCl3 valve closed
3/24/2010	4:05:26 PM	PH3 valve closed
3/24/2010	4:05:26 PM	SiCl4 pre valve closed
3/24/2010	4:05:26 PM	SiCl4 post valve closed
3/24/2010	4:05:26 PM	Main Vac valve closed
3/24/2010	4:05:26 PM	Bubbler valve closed
3/24/2010	4:05:26 PM	Bypass valve opened
3/24/2010	4:05:26 PM	Helium MFC set to  0.000000
3/24/2010	4:05:26 PM	H2 MFC set to  0.000000
3/24/2010	4:05:26 PM	BCl3 MFC set to  0.000000
3/24/2010	4:05:26 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:05:26 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:05:26 PM	Tube furnace set to 0
3/24/2010	4:05:48 PM	Helium valve closed
3/24/2010	4:05:48 PM	H2 valve closed
3/24/2010	4:05:48 PM	BCl3 valve closed
3/24/2010	4:05:48 PM	PH3 valve closed
3/24/2010	4:05:48 PM	SiCl4 pre valve closed
3/24/2010	4:05:48 PM	SiCl4 post valve closed
3/24/2010	4:05:48 PM	Bubbler valve closed
3/24/2010	4:05:48 PM	Main Vac valve opened
3/24/2010	4:05:48 PM	Bypass valve opened
3/24/2010	4:05:48 PM	Helium MFC set to  0.000000
3/24/2010	4:05:48 PM	H2 MFC set to  0.000000
3/24/2010	4:05:48 PM	BCl3 MFC set to  0.000000
3/24/2010	4:05:48 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:05:48 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:05:48 PM	Tube furnace set to 0
3/24/2010	4:10:49 PM	H2 valve closed
3/24/2010	4:10:49 PM	BCl3 valve closed
3/24/2010	4:10:49 PM	PH3 valve closed
3/24/2010	4:10:49 PM	SiCl4 pre valve closed
3/24/2010	4:10:49 PM	SiCl4 post valve closed
3/24/2010	4:10:49 PM	Main Vac valve closed
3/24/2010	4:10:49 PM	Bypass valve closed
3/24/2010	4:10:49 PM	Bubbler valve closed
3/24/2010	4:10:49 PM	Helium valve opened
3/24/2010	4:10:49 PM	Helium MFC set to  500.000000
3/24/2010	4:10:49 PM	H2 MFC set to  0.000000
3/24/2010	4:10:49 PM	BCl3 MFC set to  0.000000
3/24/2010	4:10:49 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:10:49 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:10:49 PM	Tube furnace set to 0
3/24/2010	4:12:07 PM	Helium valve closed
3/24/2010	4:12:07 PM	H2 valve closed
3/24/2010	4:12:07 PM	BCl3 valve closed
3/24/2010	4:12:07 PM	PH3 valve closed
3/24/2010	4:12:07 PM	SiCl4 pre valve closed
3/24/2010	4:12:07 PM	SiCl4 post valve closed
3/24/2010	4:12:07 PM	Main Vac valve closed
3/24/2010	4:12:07 PM	Bypass valve closed
3/24/2010	4:12:07 PM	Bubbler valve closed
3/24/2010	4:12:07 PM	Helium MFC set to  0.000000
3/24/2010	4:12:07 PM	H2 MFC set to  0.000000
3/24/2010	4:12:07 PM	BCl3 MFC set to  0.000000
3/24/2010	4:12:07 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:12:07 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:12:07 PM	Tube furnace set to 0
3/24/2010	4:12:22 PM	Helium valve closed
3/24/2010	4:12:22 PM	H2 valve closed
3/24/2010	4:12:22 PM	BCl3 valve closed
3/24/2010	4:12:22 PM	PH3 valve closed
3/24/2010	4:12:22 PM	SiCl4 pre valve closed
3/24/2010	4:12:22 PM	SiCl4 post valve closed
3/24/2010	4:12:22 PM	Main Vac valve closed
3/24/2010	4:12:22 PM	Bubbler valve closed
3/24/2010	4:12:22 PM	Bypass valve opened
3/24/2010	4:12:22 PM	Helium MFC set to  0.000000
3/24/2010	4:12:22 PM	H2 MFC set to  0.000000
3/24/2010	4:12:22 PM	BCl3 MFC set to  0.000000
3/24/2010	4:12:22 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:12:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:12:22 PM	Tube furnace set to 0
3/24/2010	4:12:45 PM	Helium valve closed
3/24/2010	4:12:45 PM	H2 valve closed
3/24/2010	4:12:45 PM	BCl3 valve closed
3/24/2010	4:12:45 PM	PH3 valve closed
3/24/2010	4:12:45 PM	SiCl4 pre valve closed
3/24/2010	4:12:45 PM	SiCl4 post valve closed
3/24/2010	4:12:45 PM	Bubbler valve closed
3/24/2010	4:12:45 PM	Main Vac valve opened
3/24/2010	4:12:45 PM	Bypass valve opened
3/24/2010	4:12:45 PM	Helium MFC set to  0.000000
3/24/2010	4:12:45 PM	H2 MFC set to  0.000000
3/24/2010	4:12:45 PM	BCl3 MFC set to  0.000000
3/24/2010	4:12:45 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:12:45 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:12:45 PM	Tube furnace set to 0
3/24/2010	4:17:45 PM	Helium valve closed
3/24/2010	4:17:45 PM	H2 valve closed
3/24/2010	4:17:45 PM	BCl3 valve closed
3/24/2010	4:17:45 PM	PH3 valve closed
3/24/2010	4:17:45 PM	SiCl4 pre valve closed
3/24/2010	4:17:45 PM	SiCl4 post valve closed
3/24/2010	4:17:45 PM	Bubbler valve closed
3/24/2010	4:17:45 PM	Main Vac valve opened
3/24/2010	4:17:45 PM	Bypass valve opened
3/24/2010	4:17:45 PM	Helium MFC set to  0.000000
3/24/2010	4:17:45 PM	H2 MFC set to  0.000000
3/24/2010	4:17:45 PM	BCl3 MFC set to  0.000000
3/24/2010	4:17:45 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:17:45 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:17:45 PM	Tube furnace set to 0
3/24/2010	4:17:46 PM	Run finished at 4:17 PM
3/24/2010	4:17:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	4:18:14 PM	Bypass valve closed
3/24/2010	4:18:15 PM	Main Vac valve closed
3/24/2010	4:18:37 PM	Bypass valve opened
3/24/2010	4:18:37 PM	Main Vac valve opened
3/24/2010	4:18:59 PM	Recipe started at 4:18 PM
3/24/2010	4:18:59 PM	Helium valve closed
3/24/2010	4:18:59 PM	BCl3 valve closed
3/24/2010	4:18:59 PM	PH3 valve closed
3/24/2010	4:18:59 PM	SiCl4 pre valve closed
3/24/2010	4:18:59 PM	SiCl4 post valve closed
3/24/2010	4:18:59 PM	Main Vac valve closed
3/24/2010	4:18:59 PM	Bypass valve closed
3/24/2010	4:18:59 PM	Bubbler valve closed
3/24/2010	4:18:59 PM	H2 valve opened
3/24/2010	4:18:59 PM	Helium MFC set to  0.000000
3/24/2010	4:18:59 PM	H2 MFC set to  500.000000
3/24/2010	4:18:59 PM	BCl3 MFC set to  0.000000
3/24/2010	4:18:59 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:18:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:18:59 PM	Tube furnace set to 0
3/24/2010	4:20:17 PM	Helium valve closed
3/24/2010	4:20:17 PM	BCl3 valve closed
3/24/2010	4:20:17 PM	PH3 valve closed
3/24/2010	4:20:17 PM	SiCl4 pre valve closed
3/24/2010	4:20:17 PM	SiCl4 post valve closed
3/24/2010	4:20:17 PM	Main Vac valve closed
3/24/2010	4:20:17 PM	Bypass valve closed
3/24/2010	4:20:17 PM	H2 valve opened
3/24/2010	4:20:17 PM	Bubbler valve opened
3/24/2010	4:20:17 PM	Helium MFC set to  0.000000
3/24/2010	4:20:17 PM	H2 MFC set to  500.000000
3/24/2010	4:20:17 PM	BCl3 MFC set to  0.000000
3/24/2010	4:20:17 PM	SiCl4 MFC set to  0.000000
3/24/2010	4:20:17 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:20:17 PM	Tube furnace set to 0
3/24/2010	4:40:18 PM	Helium valve closed
3/24/2010	4:40:18 PM	PH3 valve closed
3/24/2010	4:40:18 PM	Main Vac valve closed
3/24/2010	4:40:18 PM	Bypass valve closed
3/24/2010	4:40:18 PM	H2 valve opened
3/24/2010	4:40:18 PM	BCl3 valve opened
3/24/2010	4:40:18 PM	SiCl4 pre valve opened
3/24/2010	4:40:18 PM	SiCl4 post valve opened
3/24/2010	4:40:18 PM	Bubbler valve opened
3/24/2010	4:40:18 PM	Helium MFC set to  0.000000
3/24/2010	4:40:18 PM	H2 MFC set to  500.000000
3/24/2010	4:40:18 PM	BCl3 MFC set to  35.000000
3/24/2010	4:40:18 PM	SiCl4 MFC set to  325.000000
3/24/2010	4:40:18 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	4:40:18 PM	Tube furnace set to 0
3/24/2010	5:00:18 PM	H2 valve closed
3/24/2010	5:00:18 PM	BCl3 valve closed
3/24/2010	5:00:18 PM	PH3 valve closed
3/24/2010	5:00:18 PM	SiCl4 pre valve closed
3/24/2010	5:00:18 PM	SiCl4 post valve closed
3/24/2010	5:00:18 PM	Main Vac valve closed
3/24/2010	5:00:18 PM	Bypass valve closed
3/24/2010	5:00:18 PM	Helium valve opened
3/24/2010	5:00:18 PM	Bubbler valve opened
3/24/2010	5:00:18 PM	Helium MFC set to  500.000000
3/24/2010	5:00:18 PM	H2 MFC set to  0.000000
3/24/2010	5:00:18 PM	BCl3 MFC set to  0.000000
3/24/2010	5:00:18 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:00:18 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:00:18 PM	Tube furnace set to 0
3/24/2010	5:20:18 PM	H2 valve closed
3/24/2010	5:20:18 PM	BCl3 valve closed
3/24/2010	5:20:18 PM	PH3 valve closed
3/24/2010	5:20:18 PM	SiCl4 pre valve closed
3/24/2010	5:20:18 PM	SiCl4 post valve closed
3/24/2010	5:20:18 PM	Main Vac valve closed
3/24/2010	5:20:18 PM	Bypass valve closed
3/24/2010	5:20:18 PM	Helium valve opened
3/24/2010	5:20:18 PM	Bubbler valve opened
3/24/2010	5:20:18 PM	Helium MFC set to  500.000000
3/24/2010	5:20:18 PM	H2 MFC set to  0.000000
3/24/2010	5:20:18 PM	BCl3 MFC set to  0.000000
3/24/2010	5:20:18 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:20:18 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:20:18 PM	Tube furnace set to 0
3/24/2010	5:37:40 PM	Helium valve closed
3/24/2010	5:37:40 PM	H2 valve closed
3/24/2010	5:37:40 PM	BCl3 valve closed
3/24/2010	5:37:40 PM	PH3 valve closed
3/24/2010	5:37:40 PM	SiCl4 pre valve closed
3/24/2010	5:37:40 PM	SiCl4 post valve closed
3/24/2010	5:37:40 PM	Main Vac valve closed
3/24/2010	5:37:40 PM	Bypass valve closed
3/24/2010	5:37:40 PM	Bubbler valve closed
3/24/2010	5:37:40 PM	Helium MFC set to  0.000000
3/24/2010	5:37:40 PM	H2 MFC set to  0.000000
3/24/2010	5:37:40 PM	BCl3 MFC set to  0.000000
3/24/2010	5:37:40 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:37:40 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:37:40 PM	Tube furnace set to 0
3/24/2010	5:37:40 PM	Run finished at 5:37 PM
3/24/2010	5:51:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	5:51:48 PM	Recipe started at 5:51 PM
3/24/2010	5:51:48 PM	Helium valve closed
3/24/2010	5:51:48 PM	H2 valve closed
3/24/2010	5:51:48 PM	BCl3 valve closed
3/24/2010	5:51:48 PM	PH3 valve closed
3/24/2010	5:51:48 PM	SiCl4 pre valve closed
3/24/2010	5:51:48 PM	SiCl4 post valve closed
3/24/2010	5:51:48 PM	Main Vac valve closed
3/24/2010	5:51:48 PM	Bubbler valve closed
3/24/2010	5:51:48 PM	Bypass valve opened
3/24/2010	5:51:48 PM	Helium MFC set to  0.000000
3/24/2010	5:51:48 PM	H2 MFC set to  0.000000
3/24/2010	5:51:48 PM	BCl3 MFC set to  0.000000
3/24/2010	5:51:48 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:51:48 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:51:48 PM	Tube furnace set to 0
3/24/2010	5:52:21 PM	Helium valve closed
3/24/2010	5:52:21 PM	H2 valve closed
3/24/2010	5:52:21 PM	BCl3 valve closed
3/24/2010	5:52:21 PM	PH3 valve closed
3/24/2010	5:52:21 PM	SiCl4 pre valve closed
3/24/2010	5:52:21 PM	SiCl4 post valve closed
3/24/2010	5:52:21 PM	Bubbler valve closed
3/24/2010	5:52:21 PM	Main Vac valve opened
3/24/2010	5:52:21 PM	Bypass valve opened
3/24/2010	5:52:21 PM	Helium MFC set to  0.000000
3/24/2010	5:52:21 PM	H2 MFC set to  0.000000
3/24/2010	5:52:21 PM	BCl3 MFC set to  0.000000
3/24/2010	5:52:21 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:52:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:52:21 PM	Tube furnace set to 0
3/24/2010	5:52:21 PM	Run finished at 5:52 PM
3/24/2010	5:52:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	5:52:53 PM	Bypass valve closed
3/24/2010	5:52:53 PM	Main Vac valve closed
3/24/2010	5:53:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	5:53:07 PM	Recipe started at 5:53 PM
3/24/2010	5:53:07 PM	H2 valve closed
3/24/2010	5:53:07 PM	BCl3 valve closed
3/24/2010	5:53:07 PM	PH3 valve closed
3/24/2010	5:53:07 PM	SiCl4 pre valve closed
3/24/2010	5:53:07 PM	SiCl4 post valve closed
3/24/2010	5:53:07 PM	Main Vac valve closed
3/24/2010	5:53:07 PM	Bypass valve closed
3/24/2010	5:53:07 PM	Bubbler valve closed
3/24/2010	5:53:07 PM	Helium valve opened
3/24/2010	5:53:07 PM	Helium MFC set to  500.000000
3/24/2010	5:53:07 PM	H2 MFC set to  0.000000
3/24/2010	5:53:07 PM	BCl3 MFC set to  0.000000
3/24/2010	5:53:07 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:53:07 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:53:07 PM	Tube furnace set to 0
3/24/2010	5:54:27 PM	Helium valve closed
3/24/2010	5:54:27 PM	H2 valve closed
3/24/2010	5:54:27 PM	BCl3 valve closed
3/24/2010	5:54:27 PM	PH3 valve closed
3/24/2010	5:54:27 PM	SiCl4 pre valve closed
3/24/2010	5:54:27 PM	SiCl4 post valve closed
3/24/2010	5:54:27 PM	Main Vac valve closed
3/24/2010	5:54:27 PM	Bypass valve closed
3/24/2010	5:54:27 PM	Bubbler valve closed
3/24/2010	5:54:27 PM	Helium MFC set to  0.000000
3/24/2010	5:54:27 PM	H2 MFC set to  0.000000
3/24/2010	5:54:27 PM	BCl3 MFC set to  0.000000
3/24/2010	5:54:27 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:54:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:54:27 PM	Tube furnace set to 0
3/24/2010	5:54:42 PM	Helium valve closed
3/24/2010	5:54:42 PM	H2 valve closed
3/24/2010	5:54:42 PM	BCl3 valve closed
3/24/2010	5:54:42 PM	PH3 valve closed
3/24/2010	5:54:42 PM	SiCl4 pre valve closed
3/24/2010	5:54:42 PM	SiCl4 post valve closed
3/24/2010	5:54:42 PM	Main Vac valve closed
3/24/2010	5:54:42 PM	Bubbler valve closed
3/24/2010	5:54:42 PM	Bypass valve opened
3/24/2010	5:54:42 PM	Helium MFC set to  0.000000
3/24/2010	5:54:42 PM	H2 MFC set to  0.000000
3/24/2010	5:54:42 PM	BCl3 MFC set to  0.000000
3/24/2010	5:54:42 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:54:42 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:54:42 PM	Tube furnace set to 0
3/24/2010	5:55:05 PM	Helium valve closed
3/24/2010	5:55:05 PM	H2 valve closed
3/24/2010	5:55:05 PM	BCl3 valve closed
3/24/2010	5:55:05 PM	PH3 valve closed
3/24/2010	5:55:05 PM	SiCl4 pre valve closed
3/24/2010	5:55:05 PM	SiCl4 post valve closed
3/24/2010	5:55:05 PM	Bubbler valve closed
3/24/2010	5:55:05 PM	Main Vac valve opened
3/24/2010	5:55:05 PM	Bypass valve opened
3/24/2010	5:55:05 PM	Helium MFC set to  0.000000
3/24/2010	5:55:05 PM	H2 MFC set to  0.000000
3/24/2010	5:55:05 PM	BCl3 MFC set to  0.000000
3/24/2010	5:55:05 PM	SiCl4 MFC set to  0.000000
3/24/2010	5:55:05 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	5:55:05 PM	Tube furnace set to 0
3/24/2010	6:00:06 PM	H2 valve closed
3/24/2010	6:00:06 PM	BCl3 valve closed
3/24/2010	6:00:06 PM	PH3 valve closed
3/24/2010	6:00:06 PM	SiCl4 pre valve closed
3/24/2010	6:00:06 PM	SiCl4 post valve closed
3/24/2010	6:00:06 PM	Main Vac valve closed
3/24/2010	6:00:06 PM	Bypass valve closed
3/24/2010	6:00:06 PM	Bubbler valve closed
3/24/2010	6:00:06 PM	Helium valve opened
3/24/2010	6:00:06 PM	Helium MFC set to  500.000000
3/24/2010	6:00:06 PM	H2 MFC set to  0.000000
3/24/2010	6:00:06 PM	BCl3 MFC set to  0.000000
3/24/2010	6:00:06 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:00:06 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:00:06 PM	Tube furnace set to 0
3/24/2010	6:01:25 PM	Helium valve closed
3/24/2010	6:01:25 PM	H2 valve closed
3/24/2010	6:01:25 PM	BCl3 valve closed
3/24/2010	6:01:25 PM	PH3 valve closed
3/24/2010	6:01:25 PM	SiCl4 pre valve closed
3/24/2010	6:01:25 PM	SiCl4 post valve closed
3/24/2010	6:01:25 PM	Main Vac valve closed
3/24/2010	6:01:25 PM	Bypass valve closed
3/24/2010	6:01:25 PM	Bubbler valve closed
3/24/2010	6:01:25 PM	Helium MFC set to  0.000000
3/24/2010	6:01:25 PM	H2 MFC set to  0.000000
3/24/2010	6:01:25 PM	BCl3 MFC set to  0.000000
3/24/2010	6:01:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:01:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:01:25 PM	Tube furnace set to 0
3/24/2010	6:01:40 PM	Helium valve closed
3/24/2010	6:01:40 PM	H2 valve closed
3/24/2010	6:01:40 PM	BCl3 valve closed
3/24/2010	6:01:40 PM	PH3 valve closed
3/24/2010	6:01:40 PM	SiCl4 pre valve closed
3/24/2010	6:01:40 PM	SiCl4 post valve closed
3/24/2010	6:01:40 PM	Main Vac valve closed
3/24/2010	6:01:40 PM	Bubbler valve closed
3/24/2010	6:01:40 PM	Bypass valve opened
3/24/2010	6:01:40 PM	Helium MFC set to  0.000000
3/24/2010	6:01:40 PM	H2 MFC set to  0.000000
3/24/2010	6:01:40 PM	BCl3 MFC set to  0.000000
3/24/2010	6:01:40 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:01:40 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:01:40 PM	Tube furnace set to 0
3/24/2010	6:02:02 PM	Helium valve closed
3/24/2010	6:02:02 PM	H2 valve closed
3/24/2010	6:02:02 PM	BCl3 valve closed
3/24/2010	6:02:02 PM	PH3 valve closed
3/24/2010	6:02:02 PM	SiCl4 pre valve closed
3/24/2010	6:02:02 PM	SiCl4 post valve closed
3/24/2010	6:02:02 PM	Bubbler valve closed
3/24/2010	6:02:02 PM	Main Vac valve opened
3/24/2010	6:02:02 PM	Bypass valve opened
3/24/2010	6:02:02 PM	Helium MFC set to  0.000000
3/24/2010	6:02:02 PM	H2 MFC set to  0.000000
3/24/2010	6:02:02 PM	BCl3 MFC set to  0.000000
3/24/2010	6:02:02 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:02:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:02:02 PM	Tube furnace set to 0
3/24/2010	6:07:03 PM	H2 valve closed
3/24/2010	6:07:03 PM	BCl3 valve closed
3/24/2010	6:07:03 PM	PH3 valve closed
3/24/2010	6:07:03 PM	SiCl4 pre valve closed
3/24/2010	6:07:03 PM	SiCl4 post valve closed
3/24/2010	6:07:03 PM	Main Vac valve closed
3/24/2010	6:07:03 PM	Bypass valve closed
3/24/2010	6:07:03 PM	Bubbler valve closed
3/24/2010	6:07:03 PM	Helium valve opened
3/24/2010	6:07:03 PM	Helium MFC set to  500.000000
3/24/2010	6:07:03 PM	H2 MFC set to  0.000000
3/24/2010	6:07:03 PM	BCl3 MFC set to  0.000000
3/24/2010	6:07:03 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:07:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:07:03 PM	Tube furnace set to 0
3/24/2010	6:08:22 PM	Helium valve closed
3/24/2010	6:08:22 PM	H2 valve closed
3/24/2010	6:08:22 PM	BCl3 valve closed
3/24/2010	6:08:22 PM	PH3 valve closed
3/24/2010	6:08:22 PM	SiCl4 pre valve closed
3/24/2010	6:08:22 PM	SiCl4 post valve closed
3/24/2010	6:08:22 PM	Main Vac valve closed
3/24/2010	6:08:22 PM	Bypass valve closed
3/24/2010	6:08:22 PM	Bubbler valve closed
3/24/2010	6:08:22 PM	Helium MFC set to  0.000000
3/24/2010	6:08:22 PM	H2 MFC set to  0.000000
3/24/2010	6:08:22 PM	BCl3 MFC set to  0.000000
3/24/2010	6:08:22 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:08:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:08:22 PM	Tube furnace set to 0
3/24/2010	6:08:37 PM	Helium valve closed
3/24/2010	6:08:37 PM	H2 valve closed
3/24/2010	6:08:37 PM	BCl3 valve closed
3/24/2010	6:08:37 PM	PH3 valve closed
3/24/2010	6:08:37 PM	SiCl4 pre valve closed
3/24/2010	6:08:37 PM	SiCl4 post valve closed
3/24/2010	6:08:37 PM	Main Vac valve closed
3/24/2010	6:08:37 PM	Bubbler valve closed
3/24/2010	6:08:37 PM	Bypass valve opened
3/24/2010	6:08:37 PM	Helium MFC set to  0.000000
3/24/2010	6:08:37 PM	H2 MFC set to  0.000000
3/24/2010	6:08:37 PM	BCl3 MFC set to  0.000000
3/24/2010	6:08:37 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:08:37 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:08:37 PM	Tube furnace set to 0
3/24/2010	6:08:59 PM	Helium valve closed
3/24/2010	6:08:59 PM	H2 valve closed
3/24/2010	6:08:59 PM	BCl3 valve closed
3/24/2010	6:08:59 PM	PH3 valve closed
3/24/2010	6:08:59 PM	SiCl4 pre valve closed
3/24/2010	6:08:59 PM	SiCl4 post valve closed
3/24/2010	6:08:59 PM	Bubbler valve closed
3/24/2010	6:08:59 PM	Main Vac valve opened
3/24/2010	6:08:59 PM	Bypass valve opened
3/24/2010	6:08:59 PM	Helium MFC set to  0.000000
3/24/2010	6:08:59 PM	H2 MFC set to  0.000000
3/24/2010	6:08:59 PM	BCl3 MFC set to  0.000000
3/24/2010	6:08:59 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:08:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:08:59 PM	Tube furnace set to 0
3/24/2010	6:14:00 PM	Helium valve closed
3/24/2010	6:14:00 PM	H2 valve closed
3/24/2010	6:14:00 PM	BCl3 valve closed
3/24/2010	6:14:00 PM	PH3 valve closed
3/24/2010	6:14:00 PM	SiCl4 pre valve closed
3/24/2010	6:14:00 PM	SiCl4 post valve closed
3/24/2010	6:14:00 PM	Bubbler valve closed
3/24/2010	6:14:00 PM	Main Vac valve opened
3/24/2010	6:14:00 PM	Bypass valve opened
3/24/2010	6:14:00 PM	Helium MFC set to  0.000000
3/24/2010	6:14:00 PM	H2 MFC set to  0.000000
3/24/2010	6:14:00 PM	BCl3 MFC set to  0.000000
3/24/2010	6:14:00 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:14:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:14:00 PM	Tube furnace set to 0
3/24/2010	6:14:01 PM	Run finished at 6:14 PM
3/24/2010	6:14:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	6:14:05 PM	Bypass valve closed
3/24/2010	6:14:06 PM	Main Vac valve closed
3/24/2010	6:14:27 PM	Bypass valve opened
3/24/2010	6:14:28 PM	Main Vac valve opened
3/24/2010	6:27:36 PM	Bypass valve closed
3/24/2010	6:27:36 PM	Main Vac valve closed
3/24/2010	6:28:06 PM	Bypass valve opened
3/24/2010	6:28:06 PM	Main Vac valve opened
3/24/2010	6:28:25 PM	Recipe started at 6:28 PM
3/24/2010	6:28:25 PM	Helium valve closed
3/24/2010	6:28:25 PM	BCl3 valve closed
3/24/2010	6:28:25 PM	PH3 valve closed
3/24/2010	6:28:25 PM	SiCl4 pre valve closed
3/24/2010	6:28:25 PM	SiCl4 post valve closed
3/24/2010	6:28:25 PM	Main Vac valve closed
3/24/2010	6:28:25 PM	Bypass valve closed
3/24/2010	6:28:25 PM	Bubbler valve closed
3/24/2010	6:28:25 PM	H2 valve opened
3/24/2010	6:28:25 PM	Helium MFC set to  0.000000
3/24/2010	6:28:25 PM	H2 MFC set to  500.000000
3/24/2010	6:28:25 PM	BCl3 MFC set to  0.000000
3/24/2010	6:28:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:28:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:28:25 PM	Tube furnace set to 0
3/24/2010	6:29:43 PM	Helium valve closed
3/24/2010	6:29:43 PM	BCl3 valve closed
3/24/2010	6:29:43 PM	PH3 valve closed
3/24/2010	6:29:43 PM	SiCl4 pre valve closed
3/24/2010	6:29:43 PM	SiCl4 post valve closed
3/24/2010	6:29:43 PM	Main Vac valve closed
3/24/2010	6:29:43 PM	Bypass valve closed
3/24/2010	6:29:43 PM	H2 valve opened
3/24/2010	6:29:43 PM	Bubbler valve opened
3/24/2010	6:29:43 PM	Helium MFC set to  0.000000
3/24/2010	6:29:43 PM	H2 MFC set to  500.000000
3/24/2010	6:29:44 PM	BCl3 MFC set to  0.000000
3/24/2010	6:29:44 PM	SiCl4 MFC set to  0.000000
3/24/2010	6:29:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:29:44 PM	Tube furnace set to 0
3/24/2010	6:49:44 PM	Helium valve closed
3/24/2010	6:49:44 PM	PH3 valve closed
3/24/2010	6:49:44 PM	Main Vac valve closed
3/24/2010	6:49:44 PM	Bypass valve closed
3/24/2010	6:49:44 PM	H2 valve opened
3/24/2010	6:49:44 PM	BCl3 valve opened
3/24/2010	6:49:44 PM	SiCl4 pre valve opened
3/24/2010	6:49:44 PM	SiCl4 post valve opened
3/24/2010	6:49:44 PM	Bubbler valve opened
3/24/2010	6:49:44 PM	Helium MFC set to  0.000000
3/24/2010	6:49:44 PM	H2 MFC set to  500.000000
3/24/2010	6:49:44 PM	BCl3 MFC set to  35.000000
3/24/2010	6:49:44 PM	SiCl4 MFC set to  400.000000
3/24/2010	6:49:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	6:49:44 PM	Tube furnace set to 0
3/24/2010	7:09:44 PM	H2 valve closed
3/24/2010	7:09:44 PM	BCl3 valve closed
3/24/2010	7:09:44 PM	PH3 valve closed
3/24/2010	7:09:44 PM	SiCl4 pre valve closed
3/24/2010	7:09:44 PM	SiCl4 post valve closed
3/24/2010	7:09:44 PM	Main Vac valve closed
3/24/2010	7:09:44 PM	Bypass valve closed
3/24/2010	7:09:44 PM	Helium valve opened
3/24/2010	7:09:44 PM	Bubbler valve opened
3/24/2010	7:09:44 PM	Helium MFC set to  500.000000
3/24/2010	7:09:44 PM	H2 MFC set to  0.000000
3/24/2010	7:09:44 PM	BCl3 MFC set to  0.000000
3/24/2010	7:09:44 PM	SiCl4 MFC set to  0.000000
3/24/2010	7:09:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	7:09:44 PM	Tube furnace set to 0
3/24/2010	7:29:44 PM	H2 valve closed
3/24/2010	7:29:44 PM	BCl3 valve closed
3/24/2010	7:29:44 PM	PH3 valve closed
3/24/2010	7:29:44 PM	SiCl4 pre valve closed
3/24/2010	7:29:44 PM	SiCl4 post valve closed
3/24/2010	7:29:44 PM	Main Vac valve closed
3/24/2010	7:29:44 PM	Bypass valve closed
3/24/2010	7:29:44 PM	Helium valve opened
3/24/2010	7:29:44 PM	Bubbler valve opened
3/24/2010	7:29:44 PM	Helium MFC set to  500.000000
3/24/2010	7:29:44 PM	H2 MFC set to  0.000000
3/24/2010	7:29:44 PM	BCl3 MFC set to  0.000000
3/24/2010	7:29:44 PM	SiCl4 MFC set to  0.000000
3/24/2010	7:29:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	7:29:44 PM	Tube furnace set to 0
3/24/2010	7:49:45 PM	Helium valve closed
3/24/2010	7:49:45 PM	H2 valve closed
3/24/2010	7:49:45 PM	BCl3 valve closed
3/24/2010	7:49:45 PM	PH3 valve closed
3/24/2010	7:49:45 PM	SiCl4 pre valve closed
3/24/2010	7:49:45 PM	SiCl4 post valve closed
3/24/2010	7:49:45 PM	Main Vac valve closed
3/24/2010	7:49:45 PM	Bypass valve closed
3/24/2010	7:49:45 PM	Bubbler valve closed
3/24/2010	7:49:45 PM	Helium MFC set to  0.000000
3/24/2010	7:49:45 PM	H2 MFC set to  0.000000
3/24/2010	7:49:45 PM	BCl3 MFC set to  0.000000
3/24/2010	7:49:45 PM	SiCl4 MFC set to  0.000000
3/24/2010	7:49:45 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	7:49:45 PM	Tube furnace set to 0
3/24/2010	7:49:45 PM	Run finished at 7:49 PM
3/24/2010	8:06:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	8:06:02 PM	Recipe started at 8:06 PM
3/24/2010	8:06:02 PM	Helium valve closed
3/24/2010	8:06:02 PM	H2 valve closed
3/24/2010	8:06:02 PM	BCl3 valve closed
3/24/2010	8:06:02 PM	PH3 valve closed
3/24/2010	8:06:02 PM	SiCl4 pre valve closed
3/24/2010	8:06:02 PM	SiCl4 post valve closed
3/24/2010	8:06:02 PM	Main Vac valve closed
3/24/2010	8:06:02 PM	Bubbler valve closed
3/24/2010	8:06:02 PM	Bypass valve opened
3/24/2010	8:06:02 PM	Helium MFC set to  0.000000
3/24/2010	8:06:02 PM	H2 MFC set to  0.000000
3/24/2010	8:06:02 PM	BCl3 MFC set to  0.000000
3/24/2010	8:06:02 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:06:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:06:02 PM	Tube furnace set to 0
3/24/2010	8:06:35 PM	Helium valve closed
3/24/2010	8:06:35 PM	H2 valve closed
3/24/2010	8:06:35 PM	BCl3 valve closed
3/24/2010	8:06:35 PM	PH3 valve closed
3/24/2010	8:06:35 PM	SiCl4 pre valve closed
3/24/2010	8:06:35 PM	SiCl4 post valve closed
3/24/2010	8:06:35 PM	Bubbler valve closed
3/24/2010	8:06:35 PM	Main Vac valve opened
3/24/2010	8:06:35 PM	Bypass valve opened
3/24/2010	8:06:35 PM	Helium MFC set to  0.000000
3/24/2010	8:06:35 PM	H2 MFC set to  0.000000
3/24/2010	8:06:35 PM	BCl3 MFC set to  0.000000
3/24/2010	8:06:35 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:06:35 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:06:35 PM	Tube furnace set to 0
3/24/2010	8:06:35 PM	Run finished at 8:06 PM
3/24/2010	8:06:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	8:07:01 PM	Bypass valve closed
3/24/2010	8:07:01 PM	Main Vac valve closed
3/24/2010	8:07:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	8:07:13 PM	Recipe started at 8:07 PM
3/24/2010	8:07:13 PM	H2 valve closed
3/24/2010	8:07:13 PM	BCl3 valve closed
3/24/2010	8:07:13 PM	PH3 valve closed
3/24/2010	8:07:13 PM	SiCl4 pre valve closed
3/24/2010	8:07:13 PM	SiCl4 post valve closed
3/24/2010	8:07:13 PM	Main Vac valve closed
3/24/2010	8:07:13 PM	Bypass valve closed
3/24/2010	8:07:13 PM	Bubbler valve closed
3/24/2010	8:07:13 PM	Helium valve opened
3/24/2010	8:07:13 PM	Helium MFC set to  500.000000
3/24/2010	8:07:13 PM	H2 MFC set to  0.000000
3/24/2010	8:07:13 PM	BCl3 MFC set to  0.000000
3/24/2010	8:07:13 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:07:13 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:07:13 PM	Tube furnace set to 0
3/24/2010	8:08:32 PM	Helium valve closed
3/24/2010	8:08:32 PM	H2 valve closed
3/24/2010	8:08:32 PM	BCl3 valve closed
3/24/2010	8:08:32 PM	PH3 valve closed
3/24/2010	8:08:32 PM	SiCl4 pre valve closed
3/24/2010	8:08:32 PM	SiCl4 post valve closed
3/24/2010	8:08:32 PM	Main Vac valve closed
3/24/2010	8:08:32 PM	Bypass valve closed
3/24/2010	8:08:32 PM	Bubbler valve closed
3/24/2010	8:08:32 PM	Helium MFC set to  0.000000
3/24/2010	8:08:32 PM	H2 MFC set to  0.000000
3/24/2010	8:08:32 PM	BCl3 MFC set to  0.000000
3/24/2010	8:08:32 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:08:32 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:08:32 PM	Tube furnace set to 0
3/24/2010	8:08:48 PM	Helium valve closed
3/24/2010	8:08:48 PM	H2 valve closed
3/24/2010	8:08:48 PM	BCl3 valve closed
3/24/2010	8:08:48 PM	PH3 valve closed
3/24/2010	8:08:48 PM	SiCl4 pre valve closed
3/24/2010	8:08:48 PM	SiCl4 post valve closed
3/24/2010	8:08:48 PM	Main Vac valve closed
3/24/2010	8:08:48 PM	Bubbler valve closed
3/24/2010	8:08:48 PM	Bypass valve opened
3/24/2010	8:08:48 PM	Helium MFC set to  0.000000
3/24/2010	8:08:48 PM	H2 MFC set to  0.000000
3/24/2010	8:08:48 PM	BCl3 MFC set to  0.000000
3/24/2010	8:08:48 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:08:48 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:08:48 PM	Tube furnace set to 0
3/24/2010	8:09:10 PM	Helium valve closed
3/24/2010	8:09:10 PM	H2 valve closed
3/24/2010	8:09:10 PM	BCl3 valve closed
3/24/2010	8:09:10 PM	PH3 valve closed
3/24/2010	8:09:10 PM	SiCl4 pre valve closed
3/24/2010	8:09:10 PM	SiCl4 post valve closed
3/24/2010	8:09:10 PM	Bubbler valve closed
3/24/2010	8:09:10 PM	Main Vac valve opened
3/24/2010	8:09:10 PM	Bypass valve opened
3/24/2010	8:09:10 PM	Helium MFC set to  0.000000
3/24/2010	8:09:10 PM	H2 MFC set to  0.000000
3/24/2010	8:09:10 PM	BCl3 MFC set to  0.000000
3/24/2010	8:09:10 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:09:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:09:10 PM	Tube furnace set to 0
3/24/2010	8:14:11 PM	H2 valve closed
3/24/2010	8:14:11 PM	BCl3 valve closed
3/24/2010	8:14:11 PM	PH3 valve closed
3/24/2010	8:14:11 PM	SiCl4 pre valve closed
3/24/2010	8:14:11 PM	SiCl4 post valve closed
3/24/2010	8:14:11 PM	Main Vac valve closed
3/24/2010	8:14:11 PM	Bypass valve closed
3/24/2010	8:14:11 PM	Bubbler valve closed
3/24/2010	8:14:11 PM	Helium valve opened
3/24/2010	8:14:11 PM	Helium MFC set to  500.000000
3/24/2010	8:14:11 PM	H2 MFC set to  0.000000
3/24/2010	8:14:11 PM	BCl3 MFC set to  0.000000
3/24/2010	8:14:11 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:14:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:14:11 PM	Tube furnace set to 0
3/24/2010	8:15:29 PM	Helium valve closed
3/24/2010	8:15:29 PM	H2 valve closed
3/24/2010	8:15:29 PM	BCl3 valve closed
3/24/2010	8:15:29 PM	PH3 valve closed
3/24/2010	8:15:29 PM	SiCl4 pre valve closed
3/24/2010	8:15:29 PM	SiCl4 post valve closed
3/24/2010	8:15:29 PM	Main Vac valve closed
3/24/2010	8:15:29 PM	Bypass valve closed
3/24/2010	8:15:29 PM	Bubbler valve closed
3/24/2010	8:15:29 PM	Helium MFC set to  0.000000
3/24/2010	8:15:29 PM	H2 MFC set to  0.000000
3/24/2010	8:15:29 PM	BCl3 MFC set to  0.000000
3/24/2010	8:15:29 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:15:29 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:15:29 PM	Tube furnace set to 0
3/24/2010	8:15:45 PM	Helium valve closed
3/24/2010	8:15:45 PM	H2 valve closed
3/24/2010	8:15:45 PM	BCl3 valve closed
3/24/2010	8:15:45 PM	PH3 valve closed
3/24/2010	8:15:45 PM	SiCl4 pre valve closed
3/24/2010	8:15:45 PM	SiCl4 post valve closed
3/24/2010	8:15:45 PM	Main Vac valve closed
3/24/2010	8:15:45 PM	Bubbler valve closed
3/24/2010	8:15:45 PM	Bypass valve opened
3/24/2010	8:15:45 PM	Helium MFC set to  0.000000
3/24/2010	8:15:45 PM	H2 MFC set to  0.000000
3/24/2010	8:15:45 PM	BCl3 MFC set to  0.000000
3/24/2010	8:15:45 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:15:45 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:15:45 PM	Tube furnace set to 0
3/24/2010	8:16:07 PM	Helium valve closed
3/24/2010	8:16:07 PM	H2 valve closed
3/24/2010	8:16:07 PM	BCl3 valve closed
3/24/2010	8:16:07 PM	PH3 valve closed
3/24/2010	8:16:07 PM	SiCl4 pre valve closed
3/24/2010	8:16:07 PM	SiCl4 post valve closed
3/24/2010	8:16:07 PM	Bubbler valve closed
3/24/2010	8:16:07 PM	Main Vac valve opened
3/24/2010	8:16:07 PM	Bypass valve opened
3/24/2010	8:16:07 PM	Helium MFC set to  0.000000
3/24/2010	8:16:07 PM	H2 MFC set to  0.000000
3/24/2010	8:16:07 PM	BCl3 MFC set to  0.000000
3/24/2010	8:16:07 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:16:07 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:16:07 PM	Tube furnace set to 0
3/24/2010	8:21:07 PM	H2 valve closed
3/24/2010	8:21:07 PM	BCl3 valve closed
3/24/2010	8:21:07 PM	PH3 valve closed
3/24/2010	8:21:07 PM	SiCl4 pre valve closed
3/24/2010	8:21:07 PM	SiCl4 post valve closed
3/24/2010	8:21:07 PM	Main Vac valve closed
3/24/2010	8:21:07 PM	Bypass valve closed
3/24/2010	8:21:07 PM	Bubbler valve closed
3/24/2010	8:21:07 PM	Helium valve opened
3/24/2010	8:21:07 PM	Helium MFC set to  500.000000
3/24/2010	8:21:07 PM	H2 MFC set to  0.000000
3/24/2010	8:21:07 PM	BCl3 MFC set to  0.000000
3/24/2010	8:21:07 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:21:07 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:21:07 PM	Tube furnace set to 0
3/24/2010	8:22:25 PM	Helium valve closed
3/24/2010	8:22:25 PM	H2 valve closed
3/24/2010	8:22:25 PM	BCl3 valve closed
3/24/2010	8:22:25 PM	PH3 valve closed
3/24/2010	8:22:25 PM	SiCl4 pre valve closed
3/24/2010	8:22:25 PM	SiCl4 post valve closed
3/24/2010	8:22:25 PM	Main Vac valve closed
3/24/2010	8:22:25 PM	Bypass valve closed
3/24/2010	8:22:25 PM	Bubbler valve closed
3/24/2010	8:22:25 PM	Helium MFC set to  0.000000
3/24/2010	8:22:25 PM	H2 MFC set to  0.000000
3/24/2010	8:22:25 PM	BCl3 MFC set to  0.000000
3/24/2010	8:22:25 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:22:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:22:25 PM	Tube furnace set to 0
3/24/2010	8:22:40 PM	Helium valve closed
3/24/2010	8:22:40 PM	H2 valve closed
3/24/2010	8:22:40 PM	BCl3 valve closed
3/24/2010	8:22:40 PM	PH3 valve closed
3/24/2010	8:22:40 PM	SiCl4 pre valve closed
3/24/2010	8:22:40 PM	SiCl4 post valve closed
3/24/2010	8:22:40 PM	Main Vac valve closed
3/24/2010	8:22:40 PM	Bubbler valve closed
3/24/2010	8:22:40 PM	Bypass valve opened
3/24/2010	8:22:40 PM	Helium MFC set to  0.000000
3/24/2010	8:22:40 PM	H2 MFC set to  0.000000
3/24/2010	8:22:40 PM	BCl3 MFC set to  0.000000
3/24/2010	8:22:40 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:22:40 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:22:40 PM	Tube furnace set to 0
3/24/2010	8:23:02 PM	Helium valve closed
3/24/2010	8:23:02 PM	H2 valve closed
3/24/2010	8:23:02 PM	BCl3 valve closed
3/24/2010	8:23:02 PM	PH3 valve closed
3/24/2010	8:23:02 PM	SiCl4 pre valve closed
3/24/2010	8:23:02 PM	SiCl4 post valve closed
3/24/2010	8:23:03 PM	Bubbler valve closed
3/24/2010	8:23:03 PM	Main Vac valve opened
3/24/2010	8:23:03 PM	Bypass valve opened
3/24/2010	8:23:03 PM	Helium MFC set to  0.000000
3/24/2010	8:23:03 PM	H2 MFC set to  0.000000
3/24/2010	8:23:03 PM	BCl3 MFC set to  0.000000
3/24/2010	8:23:03 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:23:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:23:03 PM	Tube furnace set to 0
3/24/2010	8:28:03 PM	Helium valve closed
3/24/2010	8:28:03 PM	H2 valve closed
3/24/2010	8:28:03 PM	BCl3 valve closed
3/24/2010	8:28:03 PM	PH3 valve closed
3/24/2010	8:28:03 PM	SiCl4 pre valve closed
3/24/2010	8:28:03 PM	SiCl4 post valve closed
3/24/2010	8:28:03 PM	Bubbler valve closed
3/24/2010	8:28:03 PM	Main Vac valve opened
3/24/2010	8:28:03 PM	Bypass valve opened
3/24/2010	8:28:03 PM	Helium MFC set to  0.000000
3/24/2010	8:28:03 PM	H2 MFC set to  0.000000
3/24/2010	8:28:03 PM	BCl3 MFC set to  0.000000
3/24/2010	8:28:03 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:28:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:28:03 PM	Tube furnace set to 0
3/24/2010	8:28:04 PM	Run finished at 8:28 PM
3/24/2010	8:28:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	8:30:52 PM	Bypass valve closed
3/24/2010	8:30:53 PM	Main Vac valve closed
3/24/2010	8:31:08 PM	Bypass valve opened
3/24/2010	8:31:09 PM	Main Vac valve opened
3/24/2010	8:34:01 PM	Bypass valve closed
3/24/2010	8:34:02 PM	Main Vac valve closed
3/24/2010	8:34:19 PM	Bypass valve opened
3/24/2010	8:34:20 PM	Main Vac valve opened
3/24/2010	8:34:23 PM	Recipe started at 8:34 PM
3/24/2010	8:34:23 PM	Helium valve closed
3/24/2010	8:34:23 PM	BCl3 valve closed
3/24/2010	8:34:23 PM	PH3 valve closed
3/24/2010	8:34:23 PM	SiCl4 pre valve closed
3/24/2010	8:34:23 PM	SiCl4 post valve closed
3/24/2010	8:34:23 PM	Main Vac valve closed
3/24/2010	8:34:23 PM	Bypass valve closed
3/24/2010	8:34:23 PM	Bubbler valve closed
3/24/2010	8:34:23 PM	H2 valve opened
3/24/2010	8:34:23 PM	Helium MFC set to  0.000000
3/24/2010	8:34:23 PM	H2 MFC set to  500.000000
3/24/2010	8:34:23 PM	BCl3 MFC set to  0.000000
3/24/2010	8:34:23 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:34:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:34:23 PM	Tube furnace set to 0
3/24/2010	8:35:41 PM	Helium valve closed
3/24/2010	8:35:41 PM	BCl3 valve closed
3/24/2010	8:35:41 PM	PH3 valve closed
3/24/2010	8:35:41 PM	SiCl4 pre valve closed
3/24/2010	8:35:41 PM	SiCl4 post valve closed
3/24/2010	8:35:41 PM	Main Vac valve closed
3/24/2010	8:35:41 PM	Bypass valve closed
3/24/2010	8:35:41 PM	H2 valve opened
3/24/2010	8:35:41 PM	Bubbler valve opened
3/24/2010	8:35:41 PM	Helium MFC set to  0.000000
3/24/2010	8:35:41 PM	H2 MFC set to  500.000000
3/24/2010	8:35:41 PM	BCl3 MFC set to  0.000000
3/24/2010	8:35:41 PM	SiCl4 MFC set to  0.000000
3/24/2010	8:35:41 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:35:41 PM	Tube furnace set to 0
3/24/2010	8:55:41 PM	Helium valve closed
3/24/2010	8:55:41 PM	PH3 valve closed
3/24/2010	8:55:41 PM	Main Vac valve closed
3/24/2010	8:55:41 PM	Bypass valve closed
3/24/2010	8:55:41 PM	H2 valve opened
3/24/2010	8:55:41 PM	BCl3 valve opened
3/24/2010	8:55:41 PM	SiCl4 pre valve opened
3/24/2010	8:55:41 PM	SiCl4 post valve opened
3/24/2010	8:55:41 PM	Bubbler valve opened
3/24/2010	8:55:41 PM	Helium MFC set to  0.000000
3/24/2010	8:55:41 PM	H2 MFC set to  500.000000
3/24/2010	8:55:41 PM	BCl3 MFC set to  35.000000
3/24/2010	8:55:41 PM	SiCl4 MFC set to  325.000000
3/24/2010	8:55:41 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	8:55:41 PM	Tube furnace set to 0
3/24/2010	9:15:41 PM	H2 valve closed
3/24/2010	9:15:41 PM	BCl3 valve closed
3/24/2010	9:15:41 PM	PH3 valve closed
3/24/2010	9:15:41 PM	SiCl4 pre valve closed
3/24/2010	9:15:41 PM	SiCl4 post valve closed
3/24/2010	9:15:41 PM	Main Vac valve closed
3/24/2010	9:15:41 PM	Bypass valve closed
3/24/2010	9:15:41 PM	Helium valve opened
3/24/2010	9:15:41 PM	Bubbler valve opened
3/24/2010	9:15:41 PM	Helium MFC set to  500.000000
3/24/2010	9:15:41 PM	H2 MFC set to  0.000000
3/24/2010	9:15:41 PM	BCl3 MFC set to  0.000000
3/24/2010	9:15:41 PM	SiCl4 MFC set to  0.000000
3/24/2010	9:15:41 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	9:15:41 PM	Tube furnace set to 0
3/24/2010	9:35:41 PM	H2 valve closed
3/24/2010	9:35:41 PM	BCl3 valve closed
3/24/2010	9:35:41 PM	PH3 valve closed
3/24/2010	9:35:41 PM	SiCl4 pre valve closed
3/24/2010	9:35:41 PM	SiCl4 post valve closed
3/24/2010	9:35:41 PM	Main Vac valve closed
3/24/2010	9:35:41 PM	Bypass valve closed
3/24/2010	9:35:41 PM	Helium valve opened
3/24/2010	9:35:41 PM	Bubbler valve opened
3/24/2010	9:35:41 PM	Helium MFC set to  500.000000
3/24/2010	9:35:41 PM	H2 MFC set to  0.000000
3/24/2010	9:35:41 PM	BCl3 MFC set to  0.000000
3/24/2010	9:35:41 PM	SiCl4 MFC set to  0.000000
3/24/2010	9:35:41 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	9:35:41 PM	Tube furnace set to 0
3/24/2010	9:55:42 PM	Helium valve closed
3/24/2010	9:55:42 PM	H2 valve closed
3/24/2010	9:55:42 PM	BCl3 valve closed
3/24/2010	9:55:42 PM	PH3 valve closed
3/24/2010	9:55:42 PM	SiCl4 pre valve closed
3/24/2010	9:55:42 PM	SiCl4 post valve closed
3/24/2010	9:55:42 PM	Main Vac valve closed
3/24/2010	9:55:42 PM	Bypass valve closed
3/24/2010	9:55:42 PM	Bubbler valve closed
3/24/2010	9:55:42 PM	Helium MFC set to  0.000000
3/24/2010	9:55:42 PM	H2 MFC set to  0.000000
3/24/2010	9:55:42 PM	BCl3 MFC set to  0.000000
3/24/2010	9:55:42 PM	SiCl4 MFC set to  0.000000
3/24/2010	9:55:42 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	9:55:42 PM	Tube furnace set to 0
3/24/2010	9:55:42 PM	Run finished at 9:55 PM
3/24/2010	10:13:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	10:13:50 PM	Recipe started at 10:13 PM
3/24/2010	10:13:50 PM	Helium valve closed
3/24/2010	10:13:50 PM	H2 valve closed
3/24/2010	10:13:50 PM	BCl3 valve closed
3/24/2010	10:13:50 PM	PH3 valve closed
3/24/2010	10:13:50 PM	SiCl4 pre valve closed
3/24/2010	10:13:50 PM	SiCl4 post valve closed
3/24/2010	10:13:50 PM	Main Vac valve closed
3/24/2010	10:13:50 PM	Bubbler valve closed
3/24/2010	10:13:50 PM	Bypass valve opened
3/24/2010	10:13:50 PM	Helium MFC set to  0.000000
3/24/2010	10:13:50 PM	H2 MFC set to  0.000000
3/24/2010	10:13:50 PM	BCl3 MFC set to  0.000000
3/24/2010	10:13:50 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:13:50 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:13:50 PM	Tube furnace set to 0
3/24/2010	10:14:23 PM	Helium valve closed
3/24/2010	10:14:23 PM	H2 valve closed
3/24/2010	10:14:23 PM	BCl3 valve closed
3/24/2010	10:14:23 PM	PH3 valve closed
3/24/2010	10:14:23 PM	SiCl4 pre valve closed
3/24/2010	10:14:23 PM	SiCl4 post valve closed
3/24/2010	10:14:23 PM	Bubbler valve closed
3/24/2010	10:14:23 PM	Main Vac valve opened
3/24/2010	10:14:23 PM	Bypass valve opened
3/24/2010	10:14:23 PM	Helium MFC set to  0.000000
3/24/2010	10:14:23 PM	H2 MFC set to  0.000000
3/24/2010	10:14:23 PM	BCl3 MFC set to  0.000000
3/24/2010	10:14:23 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:14:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:14:23 PM	Tube furnace set to 0
3/24/2010	10:14:23 PM	Run finished at 10:14 PM
3/24/2010	10:14:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2010	10:15:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	10:15:17 PM	Recipe started at 10:15 PM
3/24/2010	10:15:17 PM	H2 valve closed
3/24/2010	10:15:17 PM	BCl3 valve closed
3/24/2010	10:15:17 PM	PH3 valve closed
3/24/2010	10:15:17 PM	SiCl4 pre valve closed
3/24/2010	10:15:17 PM	SiCl4 post valve closed
3/24/2010	10:15:17 PM	Main Vac valve closed
3/24/2010	10:15:17 PM	Bypass valve closed
3/24/2010	10:15:17 PM	Bubbler valve closed
3/24/2010	10:15:17 PM	Helium valve opened
3/24/2010	10:15:17 PM	Helium MFC set to  500.000000
3/24/2010	10:15:17 PM	H2 MFC set to  0.000000
3/24/2010	10:15:17 PM	BCl3 MFC set to  0.000000
3/24/2010	10:15:17 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:15:17 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:15:17 PM	Tube furnace set to 0
3/24/2010	10:16:37 PM	Helium valve closed
3/24/2010	10:16:37 PM	H2 valve closed
3/24/2010	10:16:37 PM	BCl3 valve closed
3/24/2010	10:16:37 PM	PH3 valve closed
3/24/2010	10:16:37 PM	SiCl4 pre valve closed
3/24/2010	10:16:37 PM	SiCl4 post valve closed
3/24/2010	10:16:37 PM	Main Vac valve closed
3/24/2010	10:16:37 PM	Bypass valve closed
3/24/2010	10:16:37 PM	Bubbler valve closed
3/24/2010	10:16:37 PM	Helium MFC set to  0.000000
3/24/2010	10:16:37 PM	H2 MFC set to  0.000000
3/24/2010	10:16:37 PM	BCl3 MFC set to  0.000000
3/24/2010	10:16:37 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:16:37 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:16:37 PM	Tube furnace set to 0
3/24/2010	10:16:52 PM	Helium valve closed
3/24/2010	10:16:52 PM	H2 valve closed
3/24/2010	10:16:52 PM	BCl3 valve closed
3/24/2010	10:16:52 PM	PH3 valve closed
3/24/2010	10:16:52 PM	SiCl4 pre valve closed
3/24/2010	10:16:52 PM	SiCl4 post valve closed
3/24/2010	10:16:52 PM	Main Vac valve closed
3/24/2010	10:16:52 PM	Bubbler valve closed
3/24/2010	10:16:52 PM	Bypass valve opened
3/24/2010	10:16:52 PM	Helium MFC set to  0.000000
3/24/2010	10:16:52 PM	H2 MFC set to  0.000000
3/24/2010	10:16:52 PM	BCl3 MFC set to  0.000000
3/24/2010	10:16:52 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:16:52 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:16:52 PM	Tube furnace set to 0
3/24/2010	10:17:15 PM	Helium valve closed
3/24/2010	10:17:15 PM	H2 valve closed
3/24/2010	10:17:15 PM	BCl3 valve closed
3/24/2010	10:17:15 PM	PH3 valve closed
3/24/2010	10:17:15 PM	SiCl4 pre valve closed
3/24/2010	10:17:15 PM	SiCl4 post valve closed
3/24/2010	10:17:15 PM	Bubbler valve closed
3/24/2010	10:17:15 PM	Main Vac valve opened
3/24/2010	10:17:15 PM	Bypass valve opened
3/24/2010	10:17:15 PM	Helium MFC set to  0.000000
3/24/2010	10:17:15 PM	H2 MFC set to  0.000000
3/24/2010	10:17:15 PM	BCl3 MFC set to  0.000000
3/24/2010	10:17:15 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:17:15 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:17:15 PM	Tube furnace set to 0
3/24/2010	10:22:15 PM	H2 valve closed
3/24/2010	10:22:15 PM	BCl3 valve closed
3/24/2010	10:22:15 PM	PH3 valve closed
3/24/2010	10:22:15 PM	SiCl4 pre valve closed
3/24/2010	10:22:15 PM	SiCl4 post valve closed
3/24/2010	10:22:15 PM	Main Vac valve closed
3/24/2010	10:22:15 PM	Bypass valve closed
3/24/2010	10:22:15 PM	Bubbler valve closed
3/24/2010	10:22:15 PM	Helium valve opened
3/24/2010	10:22:15 PM	Helium MFC set to  500.000000
3/24/2010	10:22:15 PM	H2 MFC set to  0.000000
3/24/2010	10:22:15 PM	BCl3 MFC set to  0.000000
3/24/2010	10:22:15 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:22:15 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:22:15 PM	Tube furnace set to 0
3/24/2010	10:23:34 PM	Helium valve closed
3/24/2010	10:23:34 PM	H2 valve closed
3/24/2010	10:23:34 PM	BCl3 valve closed
3/24/2010	10:23:34 PM	PH3 valve closed
3/24/2010	10:23:34 PM	SiCl4 pre valve closed
3/24/2010	10:23:34 PM	SiCl4 post valve closed
3/24/2010	10:23:34 PM	Main Vac valve closed
3/24/2010	10:23:34 PM	Bypass valve closed
3/24/2010	10:23:34 PM	Bubbler valve closed
3/24/2010	10:23:34 PM	Helium MFC set to  0.000000
3/24/2010	10:23:34 PM	H2 MFC set to  0.000000
3/24/2010	10:23:34 PM	BCl3 MFC set to  0.000000
3/24/2010	10:23:34 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:23:34 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:23:34 PM	Tube furnace set to 0
3/24/2010	10:23:49 PM	Helium valve closed
3/24/2010	10:23:49 PM	H2 valve closed
3/24/2010	10:23:49 PM	BCl3 valve closed
3/24/2010	10:23:49 PM	PH3 valve closed
3/24/2010	10:23:49 PM	SiCl4 pre valve closed
3/24/2010	10:23:49 PM	SiCl4 post valve closed
3/24/2010	10:23:49 PM	Main Vac valve closed
3/24/2010	10:23:49 PM	Bubbler valve closed
3/24/2010	10:23:49 PM	Bypass valve opened
3/24/2010	10:23:49 PM	Helium MFC set to  0.000000
3/24/2010	10:23:49 PM	H2 MFC set to  0.000000
3/24/2010	10:23:49 PM	BCl3 MFC set to  0.000000
3/24/2010	10:23:49 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:23:49 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:23:49 PM	Tube furnace set to 0
3/24/2010	10:24:11 PM	Helium valve closed
3/24/2010	10:24:11 PM	H2 valve closed
3/24/2010	10:24:11 PM	BCl3 valve closed
3/24/2010	10:24:11 PM	PH3 valve closed
3/24/2010	10:24:11 PM	SiCl4 pre valve closed
3/24/2010	10:24:11 PM	SiCl4 post valve closed
3/24/2010	10:24:11 PM	Bubbler valve closed
3/24/2010	10:24:11 PM	Main Vac valve opened
3/24/2010	10:24:11 PM	Bypass valve opened
3/24/2010	10:24:11 PM	Helium MFC set to  0.000000
3/24/2010	10:24:11 PM	H2 MFC set to  0.000000
3/24/2010	10:24:11 PM	BCl3 MFC set to  0.000000
3/24/2010	10:24:11 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:24:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:24:11 PM	Tube furnace set to 0
3/24/2010	10:29:12 PM	H2 valve closed
3/24/2010	10:29:12 PM	BCl3 valve closed
3/24/2010	10:29:12 PM	PH3 valve closed
3/24/2010	10:29:12 PM	SiCl4 pre valve closed
3/24/2010	10:29:12 PM	SiCl4 post valve closed
3/24/2010	10:29:12 PM	Main Vac valve closed
3/24/2010	10:29:12 PM	Bypass valve closed
3/24/2010	10:29:12 PM	Bubbler valve closed
3/24/2010	10:29:12 PM	Helium valve opened
3/24/2010	10:29:12 PM	Helium MFC set to  500.000000
3/24/2010	10:29:12 PM	H2 MFC set to  0.000000
3/24/2010	10:29:12 PM	BCl3 MFC set to  0.000000
3/24/2010	10:29:12 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:29:12 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:29:12 PM	Tube furnace set to 0
3/24/2010	10:30:30 PM	Helium valve closed
3/24/2010	10:30:30 PM	H2 valve closed
3/24/2010	10:30:30 PM	BCl3 valve closed
3/24/2010	10:30:30 PM	PH3 valve closed
3/24/2010	10:30:30 PM	SiCl4 pre valve closed
3/24/2010	10:30:30 PM	SiCl4 post valve closed
3/24/2010	10:30:30 PM	Main Vac valve closed
3/24/2010	10:30:30 PM	Bypass valve closed
3/24/2010	10:30:30 PM	Bubbler valve closed
3/24/2010	10:30:30 PM	Helium MFC set to  0.000000
3/24/2010	10:30:30 PM	H2 MFC set to  0.000000
3/24/2010	10:30:30 PM	BCl3 MFC set to  0.000000
3/24/2010	10:30:31 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:30:31 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:30:31 PM	Tube furnace set to 0
3/24/2010	10:30:46 PM	Helium valve closed
3/24/2010	10:30:46 PM	H2 valve closed
3/24/2010	10:30:46 PM	BCl3 valve closed
3/24/2010	10:30:46 PM	PH3 valve closed
3/24/2010	10:30:46 PM	SiCl4 pre valve closed
3/24/2010	10:30:46 PM	SiCl4 post valve closed
3/24/2010	10:30:46 PM	Main Vac valve closed
3/24/2010	10:30:46 PM	Bubbler valve closed
3/24/2010	10:30:46 PM	Bypass valve opened
3/24/2010	10:30:46 PM	Helium MFC set to  0.000000
3/24/2010	10:30:46 PM	H2 MFC set to  0.000000
3/24/2010	10:30:46 PM	BCl3 MFC set to  0.000000
3/24/2010	10:30:46 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:30:46 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:30:46 PM	Tube furnace set to 0
3/24/2010	10:31:08 PM	Helium valve closed
3/24/2010	10:31:08 PM	H2 valve closed
3/24/2010	10:31:08 PM	BCl3 valve closed
3/24/2010	10:31:08 PM	PH3 valve closed
3/24/2010	10:31:08 PM	SiCl4 pre valve closed
3/24/2010	10:31:08 PM	SiCl4 post valve closed
3/24/2010	10:31:08 PM	Bubbler valve closed
3/24/2010	10:31:08 PM	Main Vac valve opened
3/24/2010	10:31:08 PM	Bypass valve opened
3/24/2010	10:31:08 PM	Helium MFC set to  0.000000
3/24/2010	10:31:08 PM	H2 MFC set to  0.000000
3/24/2010	10:31:08 PM	BCl3 MFC set to  0.000000
3/24/2010	10:31:08 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:31:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:31:08 PM	Tube furnace set to 0
3/24/2010	10:36:08 PM	Helium valve closed
3/24/2010	10:36:08 PM	H2 valve closed
3/24/2010	10:36:08 PM	BCl3 valve closed
3/24/2010	10:36:08 PM	PH3 valve closed
3/24/2010	10:36:08 PM	SiCl4 pre valve closed
3/24/2010	10:36:08 PM	SiCl4 post valve closed
3/24/2010	10:36:08 PM	Bubbler valve closed
3/24/2010	10:36:08 PM	Main Vac valve opened
3/24/2010	10:36:08 PM	Bypass valve opened
3/24/2010	10:36:08 PM	Helium MFC set to  0.000000
3/24/2010	10:36:08 PM	H2 MFC set to  0.000000
3/24/2010	10:36:08 PM	BCl3 MFC set to  0.000000
3/24/2010	10:36:08 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:36:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:36:08 PM	Tube furnace set to 0
3/24/2010	10:36:09 PM	Run finished at 10:36 PM
3/24/2010	10:36:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/24/2010	10:45:18 PM	Bypass valve closed
3/24/2010	10:45:18 PM	Main Vac valve closed
3/24/2010	10:45:35 PM	Bypass valve opened
3/24/2010	10:45:35 PM	Main Vac valve opened
3/24/2010	10:46:08 PM	Recipe started at 10:46 PM
3/24/2010	10:46:08 PM	Helium valve closed
3/24/2010	10:46:08 PM	BCl3 valve closed
3/24/2010	10:46:08 PM	PH3 valve closed
3/24/2010	10:46:08 PM	SiCl4 pre valve closed
3/24/2010	10:46:08 PM	SiCl4 post valve closed
3/24/2010	10:46:08 PM	Main Vac valve closed
3/24/2010	10:46:08 PM	Bypass valve closed
3/24/2010	10:46:08 PM	Bubbler valve closed
3/24/2010	10:46:08 PM	H2 valve opened
3/24/2010	10:46:08 PM	Helium MFC set to  0.000000
3/24/2010	10:46:08 PM	H2 MFC set to  500.000000
3/24/2010	10:46:08 PM	BCl3 MFC set to  0.000000
3/24/2010	10:46:08 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:46:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:46:08 PM	Tube furnace set to 0
3/24/2010	10:47:27 PM	Helium valve closed
3/24/2010	10:47:27 PM	BCl3 valve closed
3/24/2010	10:47:27 PM	PH3 valve closed
3/24/2010	10:47:27 PM	SiCl4 pre valve closed
3/24/2010	10:47:27 PM	SiCl4 post valve closed
3/24/2010	10:47:27 PM	Main Vac valve closed
3/24/2010	10:47:27 PM	Bypass valve closed
3/24/2010	10:47:27 PM	H2 valve opened
3/24/2010	10:47:27 PM	Bubbler valve opened
3/24/2010	10:47:27 PM	Helium MFC set to  0.000000
3/24/2010	10:47:27 PM	H2 MFC set to  500.000000
3/24/2010	10:47:27 PM	BCl3 MFC set to  0.000000
3/24/2010	10:47:27 PM	SiCl4 MFC set to  0.000000
3/24/2010	10:47:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	10:47:27 PM	Tube furnace set to 0
3/24/2010	11:07:27 PM	Helium valve closed
3/24/2010	11:07:27 PM	PH3 valve closed
3/24/2010	11:07:27 PM	Main Vac valve closed
3/24/2010	11:07:27 PM	Bypass valve closed
3/24/2010	11:07:27 PM	H2 valve opened
3/24/2010	11:07:27 PM	BCl3 valve opened
3/24/2010	11:07:27 PM	SiCl4 pre valve opened
3/24/2010	11:07:27 PM	SiCl4 post valve opened
3/24/2010	11:07:27 PM	Bubbler valve opened
3/24/2010	11:07:27 PM	Helium MFC set to  0.000000
3/24/2010	11:07:27 PM	H2 MFC set to  500.000000
3/24/2010	11:07:27 PM	BCl3 MFC set to  35.000000
3/24/2010	11:07:27 PM	SiCl4 MFC set to  325.000000
3/24/2010	11:07:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	11:07:27 PM	Tube furnace set to 0
3/24/2010	11:22:27 PM	H2 valve closed
3/24/2010	11:22:27 PM	BCl3 valve closed
3/24/2010	11:22:27 PM	PH3 valve closed
3/24/2010	11:22:27 PM	SiCl4 pre valve closed
3/24/2010	11:22:27 PM	SiCl4 post valve closed
3/24/2010	11:22:27 PM	Main Vac valve closed
3/24/2010	11:22:27 PM	Bypass valve closed
3/24/2010	11:22:27 PM	Helium valve opened
3/24/2010	11:22:27 PM	Bubbler valve opened
3/24/2010	11:22:27 PM	Helium MFC set to  500.000000
3/24/2010	11:22:27 PM	H2 MFC set to  0.000000
3/24/2010	11:22:27 PM	BCl3 MFC set to  0.000000
3/24/2010	11:22:27 PM	SiCl4 MFC set to  0.000000
3/24/2010	11:22:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	11:22:27 PM	Tube furnace set to 0
3/24/2010	11:42:27 PM	H2 valve closed
3/24/2010	11:42:27 PM	BCl3 valve closed
3/24/2010	11:42:27 PM	PH3 valve closed
3/24/2010	11:42:27 PM	SiCl4 pre valve closed
3/24/2010	11:42:27 PM	SiCl4 post valve closed
3/24/2010	11:42:27 PM	Main Vac valve closed
3/24/2010	11:42:27 PM	Bypass valve closed
3/24/2010	11:42:27 PM	Helium valve opened
3/24/2010	11:42:27 PM	Bubbler valve opened
3/24/2010	11:42:27 PM	Helium MFC set to  500.000000
3/24/2010	11:42:27 PM	H2 MFC set to  0.000000
3/24/2010	11:42:27 PM	BCl3 MFC set to  0.000000
3/24/2010	11:42:27 PM	SiCl4 MFC set to  0.000000
3/24/2010	11:42:27 PM	Bypass solenoid MFC set to  0.000000
3/24/2010	11:42:27 PM	Tube furnace set to 0
